Clean room with laser lithography

Clean room enables dust-free environment. Monmouth Scientific, CAM2250 filter, dimensions 3.5m x 3.5m, internal height 2.4m, yellow light. Equipment in the clean room:

  • High resolution laser nanolithography system or rapid prototyping on resist-coated substrates (DaLI, continuous UV laser, 2D acousto-optical deflectors for 100 kHz beam positioning, high-precision xy table, resolution of 1µm in a 10x10cm area)
  • Class II biological safety cabinet ISO Class 4 (Class 10) – Monmouth Scientific MSC 1800
  • Spin coater, hotplate

Person in charge: Erika Tomsič, +386 5 365 3500,
Equipment location: Laboratory LFOS, University of Nova Gorica, Vipavska c. 11c, Ajdovščina, Slovenia
Equipment accessibility:
from Monday to Friday between 8 a.m and 4 p.m., or else in preceding accordance with the person in charge.
Use of the clean room and laser lithography is allowed for trained person!