Probe station is an easy to use, yet highly-precise manual probe platform for wafers and substrates up to 150 mm. It supports a wide variety of applications and accessories. The modular and flexible design allows to configure and individualize the system to match application requirements. Currently, the probe station is configured to measure precise 4-point current voltage characteristics and impedance spectroscopy of two and three terminal devices.
The system allows precise (~1µm) positioning of conductive probes. Equipped with four triaxial probes allows measurements sub pA currents. Positioning of probes is manual, a video camera with a microscope is used to observe features down to micrometer scale. The sample holder (chunk) is floating, which enables the measurements of the electric current from/to the sample or to apply bias voltage to the sample. Probe station is enclosed in a Faraday dark box to reduce electromagnetic noise. Optical workstation (Vision Isostation Newport) is used to reduce mechanical vibrations.
The current-voltage characterization is performed with a two channel source-meter Keysight B2912A. Impedance spectroscopy in the frequency range between 20Hz-2MHz is performed with Agilent Precision LCR Meter E4980A.
List of equipment:
- FormFactor probe station EPS150Triax
- Oscilloscope Tektronix DSA91304A
- Two channel source-meter Keysight B2912A
- Agilent Precision LCR Meter E4980A
- Newport vision station
Person in charge: dr. Nadiia Pastukhova, +386 5 365 3500, firstname.lastname@example.org
Equipment location: Laboratory LFOS, University of Nova Gorica, Vipavska c. 11c, Ajdovščina, Slovenia
Equipment accessibility: from Monday to Friday between 8 a.m and 4 p.m., or else in preceding accordance with the person in charge.
Use of the probe station is allowed for trained person!